High-performing submicron organic thin-film transistors fabricated by residue-free embossing

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• 作者：Christoph Auner ; Ursula Palfinger ; Herbert Gold ; Johanna Kraxner ; Anja Haase ; Thomas Haber ; Meltem Sezen ; Werner Grogger ; Georg Jakopic ; Joachim R. Krenn ; G. Leising ; Barbara Stadlober
• 关键词：Organic thin-film transistors ; Nanoimprint lithography ; Hot Embossing ; Submicron channel length
• 刊名：Organic Electronics
• 出版年：2010
• 出版时间：April 2010
• 年：2010
• 卷：11
• 期：4
• 页码：552-557
• 全文大小：689 K

文摘

In this study, we report on an innovative residue-free nanoimprint lithography process for the patterning of submicron-spaced contacts, used as source and drain electrodes in downscaled organic thin-film transistors. The method is based on thermally initiated radical polymerization of a novel imprint resist whose outstanding chemical and physical properties are responsible for the excellent results in processability and structure transfer. In combination with a pretreated stamp the thermally curable resist enables residue-free imprinting, thus making etching obsolete. In addition, this process implies only moderate temperature budgets and it is eco-friendly due to a water-based lift-off. To validate the process, source and drain patterned submicron organic thin-film transistors with pentacene as the semiconductor were fabricated, which show excellent transistor behavior parameterized by a low switch-on voltage of V<sub>sosub> = −3 V, an on–off ratio of more than 10<sup>5sup> and a charge carrier mobility of μ = 0.25 cm<sup>2sup>/V s.