Growth dependencies of epitaxial oxide thin films prepared by pulsed laser deposition

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• 作者：Xiong ; Guangcheng ; Lian ; Guijun ; Kang ; Jinfeng ; Li ; Meiya
• 关键词：Laser deposition ; Oxides ; Epitaxy ; Structural properties
• 刊名：Thin Solid Films
• 出版年：1998
• 出版时间：December 4, 1998
• 年：1998
• 卷：334
• 期：1-2
• 页码：82-86
• 全文大小：113 K

文摘

Based on the achievement of epitaxial growth in superconducting YBa₂Cu₃O_7−δ, ferromagnetic Nd_0.7Sr_0.3MnO₃ and conductive La_0.5Sr_0.5CoO₃ films, we discuss influences of substrate temperature (T_s) and substrate material in pulsed laser deposition. Influences of T_s on growth orientation and oxygen content of as-grown films, and thus on transport properties were observed. Lattice mismatch between substrates and films has a direct effect on the epitaxial growth. Surface morphology of substrates should be considered in preparation of superlattices and multilayer devices, since high-resolution-transmission-electron-microscopy revealed that a one step defect on a SrTiO₃ substrate surface developed into dislocations in a YBCO film. Additionally, undesired damage caused by differences in thermal expansion between substrates and films can be avoided by lowering cooling rates.