The −OH groups surface density and relative content of ɤ-methacryloxypropyltrimethoxysilane (MPTS) modified silica were calculated. The hydrophobicity and hygroscopicity were highly correlated with the −OH groups. MPTS self-condensation started from 4%, and became more obvious at 8%. Equilibrium Moisture Content (EMC) of modified silica was affected by self-condensation and special surface area. We proposed a mechanism concerning the MPTS modification of silica.