Optical fiber array based simultaneous parallel monitoring of resonant cantilever sensors in liquid
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- 作者：Aref Mostafazadeha ; armostafazadeh@ku.edu.tr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Goksen G. YaralioglubAuthor Vitae ; Hakan UreyaAuthor Vitae
- 关键词：MEMS sensors in liquid ; Multichannel resonant frequency tracking ; Optical fiber array readout ; Magnetic actuation ; Multichannel lock-in amplifier ; Phase based resonance tracking
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：1 May 2016
- 年：2016
- 卷：242
- 期：Complete
- 页码：132-139
- 全文大小：1518 K
文摘
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Optical Fiber Array Based Readout of MEMS Sensor Array.
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Simultaneous Parallel Monitoring of Resonant Cantilever Sensors.
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Dynamic Mode MEMS Sensor Array Operating in Liquid.
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Multichannel High-Precision Phase Measurement.