Parametric system identification of resonant micro/nanosystems operating in a nonlinear response regime

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• 作者：A.B. Sabater ^{asabater@purdue.edu" class="auth_mail" title="E-mail the corresponding author} ; J.F. Rhoads ; ^{jfrhoads@purdue.edu" class="auth_mail" title="E-mail the corresponding author}
• 关键词：Parametric system identification ; Nonlinear ; Resonance ; Microcantilever ; Micro/nanosystems ; Averaging ; Perturbation theory ; Harmonic balance ; MEMS ; NEMS
• 刊名：Mechanical Systems and Signal Processing
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：84
• 期：part_PB
• 页码：241-264
• 全文大小：2647 K

文摘

The parametric system identification of macroscale resonators operating in a nonlinear response regime can be a challenging research problem, but at the micro- and nanoscales, experimental constraints add additional complexities. For example, due to the small and noisy signals micro/nanoresonators produce, a lock-in amplifier is commonly used to characterize the amplitude and phase responses of the systems. While the lock-in enables detection, it also prohibits the use of established time-domain, multi-harmonic, and frequency-domain methods, which rely upon time-domain measurements. As such, the only methods that can be used for parametric system identification are those based on fitting experimental data to an approximate solution, typically derived via perturbation methods and/or Galerkin methods, of a reduced-order model. Thus, one could view the parametric system identification of micro/nanosystems operating in a nonlinear response regime as the amalgamation of four coupled sub-problems: nonparametric system identification, or proper experimental design and data acquisition; the generation of physically consistent reduced-order models; the calculation of accurate approximate responses; and the application of nonlinear least-squares parameter estimation. This work is focused on the theoretical foundations that underpin each of these sub-problems, as the methods used to address one sub-problem can strongly influence the results of another. To provide context, an electromagnetically transduced microresonator is used as an example. This example provides a concrete reference for the presented findings and conclusions.