Various applications of resonant pressure sensor chip based on 3-D micromachining

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• 作者：Harada ; Kinji ; Ikeda ; Kyoichi ; Kuwayama ; Hideki ; Murayama ; Hidekazu
• 关键词：Resonant sensor ; Pressure sensor ; Differential pressure transmitter ; Digital manometer ; Barometer ; Liquid level meter
• 刊名：Sensors and Actuators A: Physical
• 出版年：1999
• 出版时间：March 30, 1999
• 年：1999
• 卷：73
• 期：3
• 页码：261-266
• 全文大小：1.20 M

文摘

An accurate and stable resonant pressure sensor fabricated using 3-D micromachining process was developed. Two resonators are located on the surface of the diaphragm and applied pressure is measured from the difference of two resonant frequencies. The resonators are encapsulated into the micro-vacuum cavities in order to isolate them from surrounding fluid and to get stable resonance. Three components, namely, the diaphragm, the resonators, and the vacuum cavities, are all single crystalline and monolithically structured on the 6.8×6.8-mm wide, 0.5-mm thick silicon chip. The resonator, having a high Q-value of 50 000, was obtained owing to the vacuum isolation and resulted in superior characteristics such as resolution, repeatability and long-term stability. In the next place, the developed pressure sensor was successfully applied to the differential pressure transmitter for industrial process, and several further applications were accomplished successively.