Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties

详细信息    查看全文

• 作者：Masao Kamiya ; Hideto Tanoue ; Hirofumi Takikawa ; Makoto Taki ; Yushi Hasegawa ; Masao Kumagai
• 关键词：T-shape filtered arc deposition (T-FAD) ; Various diamond-like carbon (DLC) ; Tetrahedral amorphous carbon (ta-C) ; Heat resistance
• 刊名：Vacuum
• 出版年：2008
• 出版时间：15 October 2008
• 年：2008
• 卷：83
• 期：3
• 页码：510-514
• 全文大小：629 K

文摘

Different types of diamond-like carbon (DLC) films (ta-C, a-C, ta-C:H and a-C:H) were prepared on super hard alloy (WC-Co) substrate using a T-shape filtered arc deposition (T-FAD) system. At first, the film properties, such as structure, hydrogen content, density, hardness, elastic modulus, were measured. Ta-C prepared with a DC bias of −100 V showed the highest density (3.1 g/cm³) and hardness (70–80 GPa), and the lowest hydrogen content (less than 0.1 at. % ). It was found that the hardness of the DLC film is proportional to approximately the third power of film density. The DLC films were then heated for 60 min in an electric furnace at 550 °C in N₂. Only the ta-C film hardly change its structure, although other films were graphitized. The 200-nm thick ta-C film was then heated for 60 min through the temperature range from 400 to 800 °C in N₂ with 2 vol. % of O₂ and the film structure found to be stable up to 700 °C. The substrate was oxidized at 800 °C, indicating the ta-C film had a thermal barrier function up to that temperature.