Source of boron and phosphorus impurities in the silicon wiresawing slurry and their removal by acid leaching
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- 作者：Suning Liu ; Kai Huang ; khuang@metall.ustb.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Hongmin Zhu ; hzhu@metall.ustb.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Silicon wiresawing slurry ; Boron and phosphorus ; Source ; Recovery ; Acid leaching
- 刊名：Separation and Purification Technology
- 出版年：2017
- 出版时间：1 January 2017
- 年：2017
- 卷：172
- 期：Complete
- 页码：113-118
- 全文大小：1289 K
文摘
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The components of the silicon cutting slurry have been thoroughly studied.
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This paper confirmed that the source of boron and phosphorus was sawing wires for the first time.
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The impurities of boron and phosphorus in the cutting waste can be removed by the acid leaching process.