Investigation of nano-structured Zirconium oxide film on Ti6Al4V substrate to improve tribological properties prepared by PIII&D

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• 作者：Sehrish Saleem^a ; ^c ; R. Ahmad^a ; ^b ; ^{ahriaz@gcu.edu.pk} ; R. Ayub^b ; Uzma Ikhlaq^a ; Weihong Jin^c ; Paul K. Chu^c
• 关键词：PIII&D ; Zirconium oxide ; Wear ; XPS ; Nanoindentation
• 刊名：Applied Surface Science
• 出版年：2017
• 出版时间：1 February 2017
• 年：2017
• 卷：394
• 期：Complete
• 页码：586-597
• 全文大小：5871 K
• 卷排序：394

文摘

ZrO2 film was deposited on Ti6Al4V alloy using the plasma immersion ion implantation and deposition at various bias voltage. The deposited film was characterized by XPS, AFM, Ellipometry, Nano-indentation and Pin-on disk machine. A dense zirconium oxide film with the maximum thickness 108 nm was formed at maximum applied voltage. The hardness and wear resistance of film is much higher as compared to the substrate.