Determination of composition of non-homogeneous GaInNAs layers
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- 作者：D. Pucickia ; Damian.Pucicki@pwr.edu.pl" class="auth_mail" title="E-mail the corresponding author ; K. Bielaka ; B. Ścianaa ; D. Radziewicza ; M. Latkowska-Baranowskab ; J. Ková ; čc ; A. Vinczed ; M. Tłaczałaa
- 关键词：A1. Alloy inhomogeneity ; A1. Structural characterization ; B1. Dilute nitrides ; B2. Multicomponent semiconductors
- 刊名：Journal of Crystal Growth
- 出版年：2016
- 出版时间：1 January 2016
- 年：2016
- 卷：433
- 期：Complete
- 页码：105-113
- 全文大小：1813 K
文摘
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Dilute nitrides GaInNAs containing structures were structurally characterized.
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New algorithm for structural characterization of dilute nitrides is proposed.
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HRXRD analysis was supported by CER spectroscopy and QWs band diagram calculation.
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Inhomogeneities of the GaInNAs QWs were taken into account during characterization.
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Proposed algorithm improved accuracy of structural characterization.