Optimization of a microelectromechanical systems (MEMS) approach for miniaturized microcantilever-based RF microwave probes
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- 作者：Jaouad Marzouk ; jaouad.marzouk@iemn.univ-lille1.fr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Steve ArscottAuthor Vitae ; Abdelhatif El FellahiAuthor Vitae ; Kamel HaddadiAuthor Vitae ; Christophe BoyavalAuthor Vitae ; Sylvie LepillietAuthor Vitae ; Tuami LasriAuthor Vitae ; Gilles DambrineAuthor Vitae
- 关键词：Miniaturized radio frequency probes ; GSG probes ; Microelectromechanical systems ; Silicon-on-insulator ; Microtechnology microwave measurements ; Nanoelectronics
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：1 February 2016
- 年：2016
- 卷：238
- 期：Complete
- 页码：51-59
- 全文大小：2710 K
文摘
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MEMS technology-based miniaturized microwave ground-signal-ground (GSG) probes are proposed.
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The probe structure is designed using coplanar technology at the micrometre scale.
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Measurement performances up to 50 GHz—top of the Q-band—exhibit return loss better than 15 dB and insertion loss lower than 2.5 dB.
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Microcantilever composed of a 20 μm thick, performs well up to 50 GHz—corresponding well with previous microelectromechanical modelling.
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The contact resistance measurement shows a low contact resistance—around 0.02 Ω.
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On-wafer RF measurements using this miniaturized probe have been achieved on a CPW 68 Ω load up to 4 GHz to demonstrate the approach proposed.