Enhanced thermal characterization method of microscale heatsink structures

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• 作者：G. Taká ; cs (Assistant Lecturer) ; P.G. Szabó ; ; ^{szabop@eet.bme.hu} (Assistant Professor) ; Gy. Bogná ; r (Associate Professor)
• 关键词：Microchannel heat sink ; Thermal transient testing ; Integrated cooler
• 刊名：Microelectronics Reliability
• 出版年：2016
• 出版时间：December 2016
• 年：2016
• 卷：67
• 期：Complete
• 页码：21-28
• 全文大小：1772 K
• 卷排序：67

文摘

In the frame of thermal management of electronic devices, finding efficient cooling solutions for next generation equipment is an emerging topic. If a new or improved solution is presented it always requires efficient characterization methods to prove the benefits compared to its predecessor. In case of microscale heatsink structures which are integral parts of modern chip or package level cooling concepts, an efficient measurement method is needed to analyse the performance of structures with different layouts and/or manufacturing technologies. This paper presents an enhanced thermal characterization method of microchannel based cooling structures, determining relevant partial thermal resistances from structure functions obtained by thermal transient testing. Our prior microscale heatsink characterization method was recently improved, accounting e.g. for possible non-idealities of the heat transfer processes. This paper presents how we have improved our measurements setup in detail to deal with these phenomena compared to the previous setup.