The growth of carbon nanotubes on electrically conductive ZrN support layers for through-silicon vias
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- 作者：Sten Vollebregta ; s.vollebregt@tudelft.nl" class="auth_mail" title="E-mail the corresponding author ; Sourish Banerjeea ; 1 ; Frans D. Tichelaarb ; Ryoichi Ishiharaa
- 关键词：Carbon nanotubes ; Chemical vapour deposition ; Vertical interconnects ; Through silicon vias
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：20 April 2016
- 年：2016
- 卷：156
- 期：Complete
- 页码：126-130
- 全文大小：886 K
文摘
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Carbon nanotube bundles were grown on electrically conductive ZrN support layers.
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Aspect ratios of 30 were achieved.
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Low surface energy of ZrN likely the cause of good de-wetting of the catalyst
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Electrical measurements on CNT TSV were performed.
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First results of CNT TSV contacted on both sides by metal thin-films.