Fabrication of inverted pyramidal pits with Nano-opening by laser interference lithography and wet etching
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- 作者：Baogang Quan ; Zehan Yao ; Weijie Sun ; Zhe Liu ; Xiaoxiang Xia ; Changzhi Gu ; Junjie Li
- 刊名：Microelectronic Engineering
- 出版年：2016
- 出版时间：1 September 2016
- 年：2016
- 卷：163
- 期：Complete
- 页码：110-114
- 全文大小：799 K
文摘
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A fabrication process for 3D submicron container by combining laser interference lithography and wet etching was proposed.
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The advantages of this method lie in the tunable volume of the container and the size of the opening, and its wafer-scale fabrication process.
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A blue-shift of the absorption dip with increasing of Au film thickness was observed by study the reflection spectra of plasmonic structures.