Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

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• 作者：Ping Yang^a ; Tomohiko Takamura^a ; Satoru Takahashi^a ; Kiyoshi Takamasu^a ; ^{takamasu@pe.t.u-tokyo.ac.jp"" rel=""nofollow} ; Osamu Sato^b ; Sonko Osawa^b ; Toshiyuki Takatsuji^b
• 关键词：Multi-probe method ; Laser interferometers ; Autocollimator ; Profile ; Motion errors
• 刊名：Precision Engineering
• 出版年：2011
• 出版时间：October 2011
• 年：2011
• 卷：35
• 期：4
• 页码：686-692
• 全文大小：772 K

文摘

This paper describes a multi-probe scanning system comprising three laser interferometers and one autocollimator to measure a flat bar mirror profile with nanometer accuracy. The laser interferometers probe the surface of the flat bar mirror that is fixed on top of a scanning stage, while the autocollimator simultaneously measures the yaw error of the scanning stage. The flat bar mirror profile and horizontal straightness motion error are reconstructed by an application of simultaneous linear equations and least-squares method. Measurement uncertainties of the flat bar mirror profile were numerically evaluated for different installation distances between the laser interferometers. The average measurement uncertainty was found to be only 10 nm with installation distances of 10 and 21 mm between the first and second, and first and third interferometers, respectively. To validate the simulation results, a prototype system was built using an X–Y linear stage driven by a stepper motor with steps of 1 mm along the X direction. Experiments were conducted with fixed interferometers distances of 10 and 21 mm, as in the simulation, on a flat bar mirror with a profile known to an accuracy of λ = 632.8 nm. The average value of two standard deviations (95 % ) of the profile calculated over ten experiments was approximately 10 nm. Other results from the experiment showed that the system can also measure the yaw and horizontal straightness motion errors successfully at a high horizontal resolution. Comparing with the results measured by ZYGO's interferometer, our measured data excluding some edge points showed agreement to within approximately 10 nm. Therefore, we concluded that our measurement profile has an accuracy in the nanometer range.