刊名:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
出版年:2017
出版时间:1 February 2017
年:2017
卷:392
期:Complete
页码:62-66
全文大小:1467 K
卷排序:392
文摘
Hydrogen and helium ions coimplantation on blistering of the Z-cut LiTaO3 surface is experimentally analyzed. The accumulated lattice damage in He-first sample is significantly larger than that of H-first sample. Blistering or splitting of LiTaO3 surface is more easily achieved by He− first in coimplantation. Chemical bonding between H ions and O atoms forming of O-H structure is analyzed by infrared spectroscopy.