Sol-gel-derived TiOx thin films were fabricated on polymeric substrates with a simple heat treatment at low temperatures.
The WVTRs of the TiOx films on PEN substrates were found to be 0.0387 g m−2 day−1 at 25 °C.
The WVTR value of the TiOx thin films on PEN substrates was found to increase by only ∼13% after 100 repetitions of bending.