Chambered capsule coatings

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• 作者：Jankowski ; Alan F. ; Hayes ; Jeffrey P. ; Morse ; Jeffrey D.
• 关键词：Magnetron sputter deposition ; Ultrasonic levitation ; Inertial confinement fusion ; Coating spheres
• 刊名：Thin Solid Films
• 出版年：2001
• 出版时间：November, 2001
• 年：2001
• 卷：398-399
• 期：Complete
• 页码：587-590
• 全文大小：273 K

文摘

The sputter deposition of coatings onto polymer capsules is accomplished using a chambered substrate platform for qualitative comparison to a conventional, open bounce pan configuration. Metals are sputter deposited through an aperture onto a 1–2 mm diameter, hollow polymer sphere within a chamber that is 2–4 times the volume of the capsule. Two methods are assessed in a proof-of-principle demonstration to produce a random bounce of the capsules within each chamber in order to produce a coating with uniform thickness. The first is by ultrasonic vibration and the second through pulsed-gas levitation. Optical cross-sections of aluminum and nickel coated capsules prepared using the ultrasonic drive and pulsed-gas levitation, respectively, show that uniform coatings can be produced using a chambered substrate platform. For the examples of 1–2 μm aluminum and nickel coatings, the thickness variation is less than 30 nm. Potential advantages of the chambered approach include improved sample yield, reduced surface roughness, and waste minimization. For one example of an aluminum coating, the chambered configuration reduces the surface roughness by 300 % in comparison to the open bounce pan.