Design, fabrication, and testing of microporous wicking structure
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- 作者：Yongkang Chen ; Lawrence S. Melvin III ; Mark M. Weislogel ; Ryan M. Jenson ; Scott Dhuey ; Paul F. Nealey
- 关键词：Wicking ; MEMS ; DRIE ; Capillary flow
- 刊名：Microelectronic Engineering
- 出版年：2008
- 出版时间：May-June 2008
- 年：2008
- 卷：85
- 期：5-6
- 页码：1027-1030
- 全文大小：447 K
文摘
Wicking structures based on interior corner geometry as the fundamental transport mechanism have been studied in microgravity environments. These structures provide for highly efficient passive transport that can be exploited in advanced two-phase passive cooling systems for applications in areas such as thermal control for microelectronics. Several pilot designs have been manufactured and tested and their performance is reported.