Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing

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• 作者：Yan-Hao Yu ; Zhen-Nan Tian ; Tong Jiang ; Li-Gang Niu ; ^{niulg@jlu.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Bing-Rong Gao ; ^{brgao@jlu.edu.cn" class="auth_mail" title="E-mail the corresponding author}
• 关键词：Femtosecond laser direct writing ; Two-photon polymerization ; Fresnel zone plate array ; Large-scale structuring
• 刊名：Optics Communications
• 出版年：2016
• 出版时间：1 March 2016
• 年：2016
• 卷：362
• 期：Complete
• 页码：69-72
• 全文大小：663 K

文摘

We report on the fabrication of large-scale eight-level phase-type Fresnel zone plate arrays (FZPAs) by femtosecond-laser direct writing technology. A high-speed galvanometer scanning system was used to fabricate each Fresnel zone plate to realize high fabrication efficiency. To overcome the limited fabrication scale in the case of galvanometer scanning, inter-plate movements were controlled by multi-axis air-bearing precise positioning stages. With the system, FZPAs whose fill-factor was designed to be 100% realized a diffraction efficiency of 89%. The focusing and imaging properties of the FZPAs were also evaluated, and the FZPAs showed high fidelity.