Use of coordinate measuring machine to measure circular aperture complex optical surface

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• 作者：Xingsheng Wang ; ^{xingshengwang@njau.edu.cn} ; Jieyu Xian ; Yong Yang ; Yongnian Zhang ; Xiuqing Fu ; Min Kang
• 关键词：Complex optical surface ; CMM ; Zernike polynomials ; Cubic spline interpolation
• 刊名：Measurement
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：100
• 期：Complete
• 页码：1-6
• 全文大小：1654 K
• 卷排序：100

文摘

Circular measuring path is used to obtain the sampling points. Zernike polynomials fitting method is useful for fitting the sampling points. Spline interpolation method for probe radius compensation is applied. The proposed method meets the requirement of inspection accuracy at micron level.