TiO2/diamond UV photodetector has been fabricated with ultra thin TiO2 film on diamond. The photodetector exhibits two response peaks in UV range, which can be attributed to the combination of TiO2 and diamond. The responsivity of TiO2 decreases when TiO2 film thickness decreases. Transient response performance of the photodetector is improved when decreasing the TiO2 thickness.