Experimental investigation on oxidation kinetics of germanium by ozone
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- 作者：Xiaolei Wanga ; wangxiaolei@ime.ac.cn" class="auth_mail" title="E-mail the corresponding author ; Zhiqian Zhaoa ; Jinjuan Xianga ; Wenwu Wanga ; wangwenwu@ime.ac.cn" class="auth_mail" title="E-mail the corresponding author ; Jing Zhanga ; b ; zhangj@ncut.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Chao Zhaoa ; Tianchun Yea
- 关键词：Germanium ; Ozone ; X-ray photoelectron spectroscopy ; Oxidation kinetics ; Passivation
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 December 2016
- 年：2016
- 卷：390
- 期：Complete
- 页码：472-480
- 全文大小：1983 K
文摘
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Kinetics mechanism of Ge surface oxidation by ozone at low temperature is experimentally investigated.
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The growth process contains initially linear growth region and following parabolic growth region.
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The GeOx thickness vs. oxidation time plot obeys the well-known Deal-Grove or linear parabolic model.
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The linear growth region includes the oxidation of two topmost Ge layers, and the oxidation of third layer and following layers of Ge is diffusion limited.
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The activation energies for linear and parabolic regions are 0.04 and 0.55 eV, respectively.