Fabrication of pyramid shaped three-dimensional 8 × 8 electrodes for artificial retina

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• 作者：Kyo-in Koo ; Hum Chung ; Youngsuk Yu ; Jongmo Seo ; Jaehong Park ; Jung-Min Lim ; Seung-Joon Paik ; Sungil Park ; Hyun Min Choi ; Myoung-Jun Jeong et al.
• 关键词：Artificial vision ; Microelectrode array ; Three-dimensional electrode
• 刊名：Sensors and Actuators A: Physical
• 出版年：2006
• 出版时间：14 August 2006
• 年：2006
• 卷：130-131
• 期：Complete
• 页码：609-615
• 全文大小：599 K

文摘

This paper presents a pyramid shaped three-dimensional 8 × 8 multi-electrode array for artificial retina application. Each electrode features a pyramid shape composed of one (1 1 1) plane and two vertical planes. The cone angle between the (1 1 1) plane and the vertical plane is 19.5°, which is the sharpest angle, as far as reported name=""bbib1"">[1], name=""bbib2"">[2], name=""bbib3"">[3], name=""bbib4"">[4], name=""bbib5"">[5], name=""bbib6"">[6] and name=""bbib7"">[7]. The sharp pyramid shaped electrode is capable of penetrating the inner limiting membrane with minimal invasiveness, which in turns can stimulate retina cells more effectively than a square shaped two-dimensional electrode. The characteristic measurement of impedance magnitude and the phase shift of a single electrode are 1.19 MΩ and −80.8° at 1 kHz, respectively. Although the single three-dimensional electrode covers only 145 μm² of the base area, its magnitude of impedance is as low as a 900 μm² area two-dimensional electrode indicating that the three-dimensional electrode has higher signal-to-noise ratio than the two-dimensional electrode.