Observation of abnormal mobility enhancement in multilayer MoS₂ transistor by synergy of ultraviolet illumination and ozone plasma treatment

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• 作者：Junjie Guo ; Bingchu Yang ; ^{bingchuyang@csu.edu.cn} ; Zhouming Zheng ; Jie Jiang ; ^{jiangjie@csu.edu.cn}
• 关键词：MoS2 ; Synergy ; UV/ozone plasma treatment ; Mobility enhancement ; Field-effect transistors
• 刊名：Physica E: Low-dimensional Systems and Nanostructures
• 出版年：2017
• 出版时间：March 2017
• 年：2017
• 卷：87
• 期：Complete
• 页码：150-154
• 全文大小：679 K
• 卷排序：87

文摘

A novel method is reported to improve the mobilities in 2D MoS2 transistors. The synergy process with UV and ozone plasma treatment is developed for 2D nanoelectronics. An energy band model based on Schottky barrier modulation is proposed to understand the underlying mechanism.