Synthesis and characterization of TiO₂ nanotube film on fluorine-doped tin oxide glass

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• 作者：Jinshu Wang ; Hong Wang ; Hongyi Li ; Junshu Wu
• 关键词：TiO2 nanotube ; Ti film ; Anodization ; Impedance
• 刊名：Thin Solid Films
• 出版年：2013
• 出版时间：1 October, 2013
• 年：2013
• 卷：544
• 期：Complete
• 页码：276-280
• 全文大小：1434 K

文摘

Highly ordered TiO₂ nanotube array films were fabricated on conducting fluorine-doped tin oxide (FTO) glass substrate in NH₄HF₂/glycol electrolyte via anodization of Ti film, which was deposited by direct current magnetron sputtering. Ti films obtained by direct current magnetron sputtering method have three growth regions and that deposited at 410 ¡ãC has smooth surface which is favorable for the anodization. The anodization voltage affects the diameter of TiO₂ nanotube and the reason has been discussed. A 12.5 ¦Ìm-thick TiO₂ nanotube array film has been obtained and exhibits a high transmittance of 32 % in the visible light range. The bandgap of the thin film is calculated to be 3.08 eV based on the UV-vis transmission spectra, and its tail extends to 2.94 eV. The electrochemical impedance spectroscopy indicates that the impedance TiO₂ nanotube film decreases after light illumination.