Fiber probe for micro-hole measurement based on detection of returning light energy

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• 作者：Jiwen CuiAuthor Vitae ; Lei LiAuthor Vitae ; Junying LiAuthor Vitae ; Jiubin B. Tan ; ^{jbtan@hit.edu.cn}Author Vitae
• 关键词：Dimension metrology ; Spherical coupling probe ; Returning light energy ; Measurement of microstructure with high aspect ratio
• 刊名：Sensors and Actuators A: Physical
• 出版年：2013
• 出版时间：1 February, 2013
• 年：2013
• 卷：190
• 期：Complete
• 页码：13-18
• 全文大小：1717 K

文摘

In order to solve the problem of ultraprecision measurements of micro-holes with high aspect ratios, a tactile fiber probe based on the detection of the returning light energy center is proposed. With an incident fiber, a coupler, and an effluent fiber guiding the emission light, sufficient light energy can be provided for a photodetector, thus the shadowing effect of sidewall in a micro-hole can be eliminated. By converting the displacement of a probe tip to changes of the returning light energy center, measurement of the micro-holes with high aspect ratios can be realized. Experimental results indicate that the fiber probe has a spatial resolution of up to 0.04 ¦Ìm, a triggering repeatability better than 0.06 ¦Ìm, and a static state stability up to 0.41 ¦Ìm in 30 min. A micro-hole with a nominal diameter of ¦µ200 ¦Ìm and thickness of 2 mm has been measured, the measurement result of diameter at a depth of 1 mm is 206.03 ¦Ìm, with a standard deviation of 0.067 ¦Ìm, and an aspect ratio of 5:1.