Three-dimensional high-aspect-ratio recording in resist

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• 作者：Toshiaki Kondo ; Saulius Juodkazis ; Vygantas Mizeikis ; Hiroaki Misawa
• 关键词：Photonic bandgap ; Mechanical ; stress relaxation ; Strength ; Structural relaxation
• 刊名：Journal of Non-Crystalline Solids
• 出版年：2008
• 出版时间：15 February 2008
• 年：2008
• 卷：354
• 期：12-13
• 页码：1194-1197
• 全文大小：510 K

文摘

We demonstrate a method of capillary force reduction during wet processing of three-dimensional structures photo-polymerized in resist by femtosecond pulses. A rinse in water was added as the final step of wet processing for recovery of free-standing photo-polymerized structures with feature sizes of 100 nm. The hydrophobicity of resist was utilized for reduction of the capillary drainage force. We show a possibility of holographical recording of a three-dimensional woodpile structure, which has a good permeability and can be fabricated by the proposed modified wet processing.