A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

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• 作者：Takefumi Kanda ; Akira Makino ; Tomohisa Ono ; Koichi Suzumori ; Takeshi Morita and Minoru Kuribayashi Kurosawa
• 关键词：Piezoelectric actuator ; Ultrasonic motor ; Micro motor ; Bulk piezoelectric material ; Micro machining
• 刊名：Sensors and Actuators A: Physical
• 出版年：2006
• 出版时间：28 February 2006
• 年：2006
• 卷：127
• 期：1
• 页码：131-138
• 全文大小：624 K

文摘

In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.