文摘
In this paper, improvement of the magnetic field detection accuracy of Scanning Hall probe microscopy (SHPM) by reducing the lift-off distance was studied. The distribution of the three dimensional residual magnetic flux density components was observed around the magnetization point on the surface of carbon tool steel at several lift-off distances ranging from 350 渭m to 1500 渭m. The observation at 350 渭m lift-off distance achieved more 2.7 times intensity than at 1500 渭m lift-off distance and a correlation between the magnetic flux density and the lift-off distance was found. Based on the 350 渭m lift-off observation, a successful observation of magnetization caused by plastic deformation around the Vickers indentation was succeeded to be performed.