a-SiOx films exhibit excellent anode properties in a solid electrolyte.
a-SiO0.4 film shows exceptionally large reversible capacity over 2800 mAh g−1.
a-SiO0.4 film shows low capacity fading rate of 0.06% during the first 100 cycles.
a-SiO0.4 film shows very high rate capability comparable to that of pure a-Si.