Oxygen plasma and ion-beam treatments of nano-structured TiO2 were carried out to enhance the efficiency of dye-sensitized solar cells (DSSCs). Relative changes in surface states and recombination reactions were examined. Comparative studies showed that the oxygen ion-beam treatment was more effective in reducing the number of oxygen vacancies in TiO2 and the recombination reactions between TiO2 conduction band electrons and ions in the electrolyte than the plasma treatment. Oxygen ion-beam treated TiO2 film in the DSSC showed a 23 mV increase in the open-circuit voltage (Voc) and an improvement in the photo-conversion efficiency from 5.05 % to 6.64 % .