Effect of annealing in oxygen atmosphere on structure and microwave properties of multilayered tunable (Ba,Sr)TiO3 capacitors
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- 作者：Andrey Tumarkin ; avtumarkin@yandex.ru" class="auth_mail" title="E-mail the corresponding author ; Alexander Gagarin AGGagarin@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Andrey Altynnikov ; Mikhail Gaidukov ; Andrey Odinets ; Sergey Razumov ; Andrey Kozyrev mlp@post.eltech.ru" class="auth_mail" title="E-mail the corresponding author
- 关键词：Ferroelectric ; Microwave ; Polytitanate ; BST ; Annealing ; RF magnetron sputtering ; MEIS ; XRD
- 刊名：Thin Solid Films
- 出版年：2015
- 出版时间：30 October 2015
- 年：2015
- 卷：593
- 期：Complete
- 页码：189-192
- 全文大小：428 K
文摘
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Impurity polytitanates of strontium are formed together with the ferroelectric phase.
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Formation of polytitanates increases barium content in ferroelectric phase.
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Sr atoms redistribute from polytitanates to ferroelectric phase during the annealing.
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The low temperature annealing affects the fast-switching only.