Y ferrite films were prepared by chemical solution deposition method. Single phase Y ferrite films were grown using two-step process. Use of nucleation seeds stimulated crystallization and oriented growth of Y phase. Two types of seeds were used: hexagonal (BaSr)(GaAl)12O19 and cubic CoFe2O4. The best orientation of Y films was obtained with (BaSr)(GaAl)12O19 seeding.