Laser-induced damage characteristics in fused silica surface due to mechanical and chemical defects during manufacturing processes

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• 作者：Yaguo Li^a ; ^{yargolee@163.com} ; Zhigang Yuan^a ; Jian Wang^a ; Qiao Xu^b
• 关键词：Laser induced damage ; Optical manufacturing ; Fused silica ; Cracks and scratches ; Metallic contamination
• 刊名：Optics & Laser Technology
• 出版年：2017
• 出版时间：1 June 2017
• 年：2017
• 卷：91
• 期：Complete
• 页码：149-158
• 全文大小：1883 K
• 卷排序：91

文摘

Damage threshold at scratches is improved by 250% after HF-based etching. Cracks can be healed in part by thermal annealing. Metallic contamination can be removed by leaching while keep surface roughness. Scratches can be substantially decreased using improved polishing process. Leaching is better to improve threshold of surface without mechanical defects.