Fast reversible switching Sb2Te-SiNx films with high thermal stability
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- 作者：Yun Menga ; b ; Peigao Hana ; hanpeigao@126.com" class="auth_mail" title="E-mail the corresponding author ; Liangcai Wub ; uliangcai@mail.sim.ac.cn" class="auth_mail" title="E-mail the corresponding author ; Dianzhong Haoa ; Zhitang Songb ; Bo Liub ; Zhongyuan Mac ; Ling Xuc ; Lianke Songa
- 关键词：Sb2Te&ndash ; SiNx ; Nanocomposite ; Thin film ; Rapid transition ; Thermal stability
- 刊名：Materials Letters
- 出版年：2016
- 出版时间：15 January 2016
- 年：2016
- 卷：163
- 期：Complete
- 页码：201-204
- 全文大小：2045 K
文摘
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In PCM devices, the oxidation of Sb and Te elements can be avoided.
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XRD and TEM results prove SiNx suppresses the crystallization of Sb2Te films.
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SET/RESET operation of 8 ns is realized with large sensing margin.