Nanocrystalline tungsten doped zinc oxide was synthesized by the sol-gel method. The linear and planar faults have been studied using DiffaX and eCMWP methods. The anisotropic strain behavior is nearly similar to {11.1}〈1¯1¯.6〉 tensile twins. As the W doping increases, the values of twinning probability and dislocation density increase.