Ridge waveguide fabrication by combining ion implantation and precise dicing on a LiNbO₃ crystal

详细信息    查看全文

• 作者：Yu-Fan Zhou ; Lei Wang ; Peng Liu ; Tao Liu ; Lian Zhang ; Dong-Ting Huang ; Xue-Lin Wang ; ^{xuelinwang@sdu.edu.cn" class="auth_mail}
• 关键词：LiNbO3 crystal ; Ion implantation ; Ridge optical waveguide ; Precise diamond blade dicing
• 刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 出版年：1 May, 2014
• 年：2014
• 卷：326
• 期：Complete
• 页码：110-112
• 全文大小：745 K

文摘

A ridge waveguide structure was prepared on a z-cut LiNbO₃ crystal wafer by a combined process of ion implantation and precise dicing. The single-crystal LiNbO₃ was implanted at room temperature using 3 MeV oxygen ions at a fluence of 5 脳 10¹⁴ ions/cm². After annealing to 200 掳C, ridge structures were formed on the wafer surface by precise diamond blade dicing. Two different ridge widths, 8 and 10 渭m, were chosen for comparison. The refractive index profile was reconstructed, and the near-field intensity distribution of the mode was recorded by a CCD camera using the end-face coupling method. FD-BPM was used to simulate the guided mode profile. Transmission and reflection optical microscopy were used to obtain micro-photograph images of the waveguide structure.