Advancing FIB assisted 3D EBSD using a static sample setup
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- 作者：Julien Guyon<sup>asup><sup> ; sup><sup>bsup> ; Nathalie Gey<sup>asup><sup> ; sup><sup>bsup><sup> ; sup><sup>nathalie.gey@univ-lorraine.fr" class="auth_mail" title="E-mail the corresponding authorsup> ; Daniel Goran<sup>csup> ; Smail Chalal<sup>dsup> ; Fabiá ; n Pé ; rez-Willard<sup>dsup>
- 关键词：FIB&ndash ; SEM ; 3D EBSD ; Static setup ; Tomography ; Grain boundary
- 刊名：Ultramicroscopy
- 出版年：2016
- 出版时间：February 2016
- 年：2016
- 卷：161
- 期：Complete
- 页码：161-167
- 全文大小：3141 K
文摘
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A static setup for 3D EBSD data collection in a conventional FIB–SEM is presented.
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The setup advantages are illustrated on an INCONEL sample containing coherent twins.
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The raw 3D EBSD data set offers an orientation precision of less than 1° in z-direction.
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Good raw slice alignment enables the coherent twin planes to be reliably reconstructed.
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Further, our setup improves throughput up to 25% as compared to non-static setups.