Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications

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• 作者：I.J. Induja^a ; K.P. Surendran^a ; M.R. Varma^a ; M.T. Sebastian^b ;
• 关键词：LTCC ; Al2O3 ; Dielectric properties ; Microwave dielectrics
• 刊名：Ceramics International
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：43
• 期：1
• 页码：736-740
• 全文大小：851 K

文摘

Alumina based low κ LTCC composite has been prepared with the use of AGC commercial glass (DL828). The 30 wt% Al₂O₃–70 wt% AGC glass composite was sintered at 875 °C (2 h). X-ray diffraction study indicated the presence of BaSi₂O₅, BaAl₂Si₂O₈ and Ba₂Si₃O₈ secondary phases in addition to Al₂O₃ in the composite. The bulk ceramic sintered at 875 °C has κ of 4.80 and tan δ of 0.007 at 1 MHz. The composite shows good microwave dielectric properties: κ of 4.52, tan δ of 0.004 and τ_κ close to zero. The composite has a low CTE of 4.38 ppm/°C which is close to that of silicon used in microelectronic industry and thermal conductivity of 1.41 W m⁻¹ K⁻¹ at room temperature. The results indicate that the Al₂O₃ - AGC glass composite has good dielectric, thermal properties and is chemically compatible with Ag electrode indicating it as a promising candidate for low κ LTCC substrate applications.