A separable piezoelectric micropump with unique “bossed” diaphragm is proposed.
The pump can be separated into reusable actuator and single-use part.
The pump can achieve a low-cost and contamination-free liquid delivery.
The bossed diaphragm facilitates installation and adjustment.
Flow rate can be modulated from 1.58 to 6.21 ml/min at frequencies below 20 Hz.