A free-hanging strain-gauge for ultraminiaturized pressure sensors
详细信息 查看全文
- 作者：Melvå ; s ; Patrik ; Kä ; lvesten ; Edvard ; Enoksson ; Peter ; Stemme ; Gö ; ran
- 关键词：Pressure sensor ; Miniaturized ; Force transducing beam
- 刊名：Sensors and Actuators A: Physical
- 出版年：2002
- 出版时间：April 1, 2002
- 年：2002
- 卷：97-98
- 期：Complete
- 页码：75-82
- 全文大小：384 K
文摘
The first entirely surface micromachined free-hanging strain-gauge pressure sensor is presented. The sensing element consists of a 80μm long H-shaped force transducing beam supported at both ends. The H-shape enables the strain-gauge to be a part of the beam without the need for additional layers. The beam is located beneath and attached at one end to a square polysilicon diaphragm and at the other end to the cavity edge. The diaphragm of the fabricated sensor is 2μm thick and has a side length of only 100μm. The new design enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity of the sensor with a H-shaped 0.4μm thick force transducing beam was measured to be 5μV/V/mmHg.