A lift force sensor with integrated hot-chips for wide range flow measurements

详细信息    查看全文

• 作者：Svedin ; Niklas ; Kä ; lvesten ; Edvard ; Stemme ; Gö ; ran
• 关键词：Gas flow sensor ; Lift force ; Anemometer ; Piezoresistive
• 刊名：Sensors and Actuators A: Physical
• 出版年：2003
• 出版时间：December 1, 2003
• 年：2003
• 卷：109
• 期：1-2
• 页码：120-130
• 全文大小：431 K

文摘

The lift force gas flow sensor uses the force normal to the fluid flow to measure the flow velocity. Two thin plates mounted at an angle are deflected when they are subjected to fluid flow. By combining the mechanical lift force sensor and a thermal hot-chip sensor we now have obtained a sensor capable of high sensitivity in both high and low flows. Both the thermal and the non-thermal parts of the flow sensor have non-linear flow dependencies leading to a flow dependent sensitivity where the hot-chip part has its highest sensitivity for low flows and the lift force part has its highest sensitivity for high flows.