Ti0·33Al0.67 cathode surface modifications and the effect on the mechanical and electrochemical properties of AlTiN coating
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- 作者：Yinchao Xua ; b ; Kanghua Chena ; khchen@csu.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Shequan Wangb ; Chenxi Pana ; Songyi Chena
- 关键词：Ti0· ; 33Al0.67 target ; Converted layers ; AlTiN coating ; Macroparticles ; Properties
- 刊名：Vacuum
- 出版年：2016
- 出版时间：September 2016
- 年：2016
- 卷：131
- 期：Complete
- 页码：97-105
- 全文大小：3751 K
文摘
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AlxTiy intermetallic and (Ti, Al) N nitride were on the surface of the eroded target.
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Fewer macroparticles in the surface of coating deposited by eroded cathode.
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The mechanical property of the coating deposited by eroded cathode is improved.
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The electrochemical property of the coating deposited by eroded cathode is improved.