HR and AR mirrors designed, optimized and synthesized by Ion Assisted Deposition.
Ion Beam Assist optimum condition were used to improve quality nanostructure mirror.
Front transmission and back reflection of mirrors were obtained 97.1% and 99.4%.
About 1 nm RMS roughness from AFM analysis proved extra rough surface of mirrors.
FESEM showed the nanostructure, precise interface and thickness of laser mirrors.