We have found that a Si film vacuum deposited on a Ni foil has a Li insertion capacity over 2000mAh/g with cycleability over 1000cycles, but a great issue was its difficulty to obtain a sufficiently thicker film capable of high current charge/discharge. In the present paper the examination of the high current charge/discharge performance of thicker Si film in relation to the film formation condition. The electrochemical evaluation was performed with cyclic voltammetry (CV) and constant current charge/discharge test with various loading currents in PC containing 1M LiClO4.