Improving the work function of the niobium surface of SRF cavities by plasma processing
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- 作者：P.V. Tyagi ; pvtyagi@gmail.com" class="auth_mail" title="E-mail the corresponding author ; tyagipv@ornl.gov" class="auth_mail" title="E-mail the corresponding author ; M. Doleans ; B. Hannah ; R. Afanador ; C. McMahan ; S. Stewart ; J. Mammosser ; M. Howell ; J. Saunders ; B. Degraff ; S.-H. Kim
- 关键词：SRF cavity ; Plasma processing ; Surface science ; Hydrocarbons removal ; Niobium surface ; Secondary Ion Mass Spectroscopy ; Scanning kelvin probe ; Work function
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 April 2016
- 年：2016
- 卷：369
- 期：Complete
- 页码：29-35
- 全文大小：1032 K
文摘
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An in situ plasma processing for SNS SRF cavities has been developed to remove hydrocarbons from cavity surface.
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Reactive oxygen plasma is very effective to remove hydrocarbons from niobium top surface.
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Reactive oxygen plasma processing increases the work function of niobium surface in the range of 0.5–1.0 eV.
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It was observed that hydrocarbons can migrate at plasma cleaned top surface from near surface regions when waiting in vacuum at room temperature.
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Multiple cycles of plasma processing with waiting periods in between was found beneficial to mitigate such hydrocarbons migration at plasma cleaned surface.