Multiscale modeling and run-to-run control of PECVD of thin film solar cells
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- 作者：Marquis Crose
- 关键词：Process modeling ; Plasma-enhanced chemical vapor deposition ; Thin film solar cells ; Multiscale modeling ; Parallel computing ; Run-to-run control
- 刊名：Renewable Energy
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：100
- 期：Complete
- 页码：129-140
- 全文大小：1363 K
文摘
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- <p id="p0010">Multiscale modeling of the evolution of gas phase species and film thickness and surface morphology.p>
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- <p id="p0015">Parallel computation for efficient solution of multiscale model.p>
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- <p id="p0020">Run-ton-run control for reduction of reactor drift on film properties.p>
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- <p id="p0025">Manufacturing of thin films with desired film thickness and surface morphology.p>