Synthesizing SnO₂ thin films and characterizing sensing performances

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• 作者：Takeshi Ohgaki ; Ryota Matsuoka ; Ken Watanabe ; Kenji Matsumoto ; Yutaka Adachi ; Isao Sakaguchi ; Shunichi Hishita ; Naoki Ohashi ; Hajime Haneda
• 关键词：SnO₂ ; Gas sensor ; Thin film ; Pulsed laser deposition ; Electric property
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2010
• 出版时间：21 September 2010
• 年：2010
• 卷：150
• 期：1
• 页码：99-104
• 全文大小：373 K

文摘

SnO₂ thin films were grown on silica glass substrates using the pulsed laser deposition (PLD) method, and their structures, electric properties, and sensor performances were examined to investigate the sensing mechanism of thin-film gas sensors. Single-phase SnO₂ films with rutile-type structures were obtained at 650 °C. All the SnO₂ films had many columnar grains, and the grain size increased with film thickness. Measurements of the Hall coefficient at room temperature revealed that the Hall mobility of the films was independent of the film thickness. In contrast, the sensing performances of the films for NO₂ and H₂ gases respectively in an air atmosphere drastically improved for film thicknesses under 100 nm. These results for the film properties and sensing performances of SnO₂ thin films are discussed in terms of a space-charge layer formed on the columnar grains.