MEMS piezoelectric artificial basilar membrane with passive frequency selectivity for short pulse width signal modulation

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• 作者：Jongmoon Jang ; Sangwon Kim ; David J. Sly ; Stephen J. O鈥檒eary ; Hongsoo Choi
• 关键词：MEMS ; Piezoelectric acoustic sensor ; Frequency selectivity ; Artificial basilar membrane (ABM)
• 刊名：Sensors and Actuators A: Physical
• 出版年：1 December, 2013
• 年：2013
• 卷：203
• 期：Complete
• 页码：6-10
• 全文大小：1883 K

文摘

We demonstrated a novel MEMS artificial basilar membrane composed of a piezoelectric beam array that mimics the passive frequency selectivity of the cochlea and exhibits acoustic-to-electrical energy conversion. Each beam was designed to have a unique resonance frequency. To determine the resonance frequencies of the beams, the displacement and piezoelectric voltage were measured by applying a periodic chirped signal with a sound pressure level of 109.7 dB. The measured resonance frequencies were in the range 10-37 kHz. The piezoelectric signal was used to modulate a finite pulse-width signal for electrical stimulation; the pulse widths were in the range 0.43-5.1 ms with sound pressure levels in the range 84.9-112.4 dB.